Chin. J. Semicond. > 1996, Volume 17?>?Issue 1?> 27-34

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1996

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      高玉芝，張利春，尹紅坤，寧寶俊. 全離子注入自對準難熔金屬氮化物復合柵GaAs MESFET技術研究[J]. 半導體學報(英文版), 1996, 17(1): 27-34.
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      高玉芝，張利春，尹紅坤，寧寶俊. 全離子注入自對準難熔金屬氮化物復合柵GaAs MESFET技術研究[J]. 半導體學報(英文版), 1996, 17(1): 27-34.

      • Received Date: 2015-08-18

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