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J. Semicond. > 2008, Volume 29?>?Issue 10?> 2003-2008

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Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate

Zhao Jian, Chen Yonghai, Wang Zhanguo and Xu Bo

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Abstract: Droplet epitaxy is a new MBE growth method for semiconductor materials,but there has been no effective research concerning the influence of patterned substrate on droplet epitaxy until now.The authors report different quantum dots and quantum rings grown on different types of μm-scale patterned substrates and analyze the influence of patterned substrate on droplet epitaxy,the formation mechanism of the quantum rings,and their distribution behavior.

Key words: droplet epitaxy, patterned substrate, quantum dot, quantum ring, distribution behavior

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    Received: 18 August 2015 Revised: 22 April 2008 Online: Published: 01 October 2008

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      Zhao Jian, Chen Yonghai, Wang Zhanguo, Xu Bo. Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate[J]. Journal of Semiconductors, 2008, 29(10): 2003-2008. ****Zhao J, Chen Y H, Wang Z G, Xu B. Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate[J]. J. Semicond., 2008, 29(10): 2003.
      Citation:
      Zhao Jian, Chen Yonghai, Wang Zhanguo, Xu Bo. Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate[J]. Journal of Semiconductors, 2008, 29(10): 2003-2008. ****
      Zhao J, Chen Y H, Wang Z G, Xu B. Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate[J]. J. Semicond., 2008, 29(10): 2003.

      Growth of InAs/GaAs Quantum Dots and Quantum Rings by Droplet Epitaxy Based on Patterned Substrate

      • Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

      • Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

      • Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

      • Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

      • Received Date: 2015-08-18
      • Accepted Date: 2008-04-02
      • Revised Date: 2008-04-22
      • Published Date: 2008-11-11

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