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J. Semicond. > 2020, Volume 41?>?Issue 3?> 032302

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Fabrication of flexible AlGaInP LED

Qiaoli Liu^{1, 2}, Yajie Feng², Huijun Tian³, Xiaoying He¹, Anqi Hu¹ and Xia Guo^1,

+ Author Affiliations + Find other works by these authors

• 1. School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, ChinaSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
• 2. School of Information, Beijing University of Technology, Beijing 100124, ChinaSchool of Information, Beijing University of Technology, Beijing 100124, China
• 3. Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, ChinaInstitute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

• Qiaoli Liu
• Yajie Feng
• Huijun Tian
• Xiaoying He
• Anqi Hu
• Xia Guo

 Corresponding author: Xia Guo, Email: guox@bupt.edu.cn

DOI: 10.1088/1674-4926/41/3/032302

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Abstract: Flexible light-emitting diodes (LEDs) are highly desired for wearable devices, flexible displays, robotics, biomedicine, etc. Traditionally, the transfer process of an ultrathin wafer of about 10–30 μm to a flexible substrate is utilized. However, the yield is low, and it is not applicable to thick GaN LED chips with a 100 μm sapphire substrate. In this paper, transferable LED chips utilized the mature LED manufacture technique are developed, which possesses the advantage of high yield. The flexible LED array demonstrates good electrical and optical performance.

Key words: light-emitting diodes (LEDs), flexible, transfer, performance

References

[1]	Pattison P M, Hansen M, Tsao J Y. LED lighting efficacy: status and directions. Compt Rend Phys, 2018, 19(3), 134 doi: 10.1016/j.crhy.2017.10.013
[2]	Nair G B, Dhoble S J. A perspective perception on the applications of light-emitting diodes. Luminescence, 2015, 30(8), 1167 doi: 10.1002/bio.2919
[3]	Hirayama H, Fujikawa S, Kamata N. Recent progress in AlGaN-based deep-UV LEDs. Electron Commun Jpn, 2015, 98(5), 1 doi: 10.1002/ecj.11667
[4]	Guilhabert B, Massoubre D, Richardson E, et al. Sub-micron lithography using InGaN micro-LEDs: mask-free fabrication of LED arrays. IEEE Photonic Tech Lett, 2012, 24(24), 2221 doi: 10.1109/LPT.2012.2225612
[5]	Lee S Y, Park K I, Huh C, et al. Water-resistant flexible GaN LED on a liquid crystal polymer substrate for implantable biomedical applications. Nano Energy, 2012, 1(1), 145 doi: 10.1016/j.nanoen.2011.07.001
[6]	Choi M K, Yang J, Kang K, et al. Wearable red-green-blue quantum dot light-emitting diode array using high-resolution intaglio transfer printing. Nat Commun, 2015, 6, 7149 doi: 10.1038/ncomms8149
[7]	Kim J, Lee J, Son D, et al. Deformable devices with integrated functional nanomaterials for wearable electronics. Nano Converg, 2016, 3(1), 4 doi: 10.1186/s40580-016-0062-1
[8]	Zhang Z, Du J, Zhang D, et al. Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes. Nat Commun, 2017, 8, 14560 doi: 10.1038/ncomms14560
[9]	Kim S, Kwon H J, Lee S, et al. Low-power flexible organic light-emitting diode display device. Adv Mater, 2011, 23(31), 3511 doi: 10.1002/adma.201101066
[10]	Sekitani T, Nakajima H, Maeda H, et al. Stretchable active-matrix organic light-emitting diode display using printable elastic conductors. Nat Mater, 2009, 8(6), 494 doi: 10.1038/nmat2459
[11]	Geffroy B, Le Roy P, Prat C. Organic light-emitting diode (OLED) technology: materials, devices and display technologies. Polym Int, 2006, 55(6), 572 doi: 10.1002/pi.1974
[12]	Sun Z, Liu Z, Li J, et al. Infrared photodetectors based on CVD-grown graphene and PbS quantum dots with ultrahigh responsivity. Adv Mater, 2012, 24(43), 5878 doi: 10.1002/adma.201202220
[13]	Tao L, Chen Z, Li X, et al. Hybrid graphene tunneling photoconductor with interface engineering towards fast photoresponse and high responsivity. npj 2D Mater Appl, 2017, 1(1), 19 doi: 10.1038/s41699-017-0016-4
[14]	Sun Y L, Xie D, Sun M, et al. Hybrid graphene/cadmium-free ZnSe/ZnS quantum dots phototransistors for UV detection. Sci Rep, 2018, 8(1), 5107 doi: 10.1038/s41598-018-23507-y
[15]	Sun T, Wang Y, Yu W, et al. Flexible broadband graphene photodetectors enhanced by plasmonic Cu3–xP colloidal nanocrystals. Small, 2017, 13(42), 1701881 doi: 10.1002/smll.201701881
[16]	Kim R H, Kim D H, Xiao J, et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nat Mater, 2010, 9(11), 929 doi: 10.1038/nmat2879
[17]	Gao D, Wang W, Liang Z, et al. Design of micro, flexible light-emitting diode arrays and fabrication of flexible electrodes. J Phys D, 2016, 49(40), 405108 doi: 10.1088/0022-3727/49/40/405108
[18]	Shervin S, Kim S H, Asadirad M, et al. Bendable III–N visible light-emitting diodes beyond mechanical flexibility: Theoretical study on quantum efficiency improvement and color tunability by external strain. ACS Photon, 2016, 3(3), 486 doi: 10.1021/acsphotonics.5b00745
[19]	Lin C F, Su C L, Wu H M, et al. Bendable InGaN light-emitting nanomembranes with tunable emission wavelength. ACS Appl Mater Inter, 2018, 10(43), 37725 doi: 10.1021/acsami.8b14506

Fig. 1.  (Color online) Illustration of fabrication process of flexible LEDs. (a) After Ti/Au layer deposition and photolithography, the bottom n-electrodes are patterned on the polyimide substrate. (b) Application of conductive silver paste. (c) Transfer of LED chips from PVC film to polyimide substrate. (d) BCB coating and then photolithography to expose the top electrodes of LEDs. (e) Top metal layer deposition. (f) Patterned top p-electrodes after photolithography. (g) Schematic cross section of flexible LEDs.

DownLoad: Full-Size Img PowerPoint

Fig. 2.  (Color online) (a) Metallurgical microscope image of the transferred LED arrays under the current injection of 1 mA. (b) and (c) Side-view images of concave and convex bent LED arrays, respectively.

DownLoad: Full-Size Img PowerPoint

Fig. 3.  (Color online) (a) Comparison of forward I–V characteristics of transferred LED array before and after bending with the curvature of 5, 8, and 11 mm, respectively. The voltage drop is 2 V under the current injection of 20 mA. (b) EL spectra comparison of the transferred LED under the current injection of 5 mA before and after bending. The red-shift of peak wavelength is due to heat.

DownLoad: Full-Size Img PowerPoint

[1]	Pattison P M, Hansen M, Tsao J Y. LED lighting efficacy: status and directions. Compt Rend Phys, 2018, 19(3), 134 doi: 10.1016/j.crhy.2017.10.013
[2]	Nair G B, Dhoble S J. A perspective perception on the applications of light-emitting diodes. Luminescence, 2015, 30(8), 1167 doi: 10.1002/bio.2919
[3]	Hirayama H, Fujikawa S, Kamata N. Recent progress in AlGaN-based deep-UV LEDs. Electron Commun Jpn, 2015, 98(5), 1 doi: 10.1002/ecj.11667
[4]	Guilhabert B, Massoubre D, Richardson E, et al. Sub-micron lithography using InGaN micro-LEDs: mask-free fabrication of LED arrays. IEEE Photonic Tech Lett, 2012, 24(24), 2221 doi: 10.1109/LPT.2012.2225612
[5]	Lee S Y, Park K I, Huh C, et al. Water-resistant flexible GaN LED on a liquid crystal polymer substrate for implantable biomedical applications. Nano Energy, 2012, 1(1), 145 doi: 10.1016/j.nanoen.2011.07.001
[6]	Choi M K, Yang J, Kang K, et al. Wearable red-green-blue quantum dot light-emitting diode array using high-resolution intaglio transfer printing. Nat Commun, 2015, 6, 7149 doi: 10.1038/ncomms8149
[7]	Kim J, Lee J, Son D, et al. Deformable devices with integrated functional nanomaterials for wearable electronics. Nano Converg, 2016, 3(1), 4 doi: 10.1186/s40580-016-0062-1
[8]	Zhang Z, Du J, Zhang D, et al. Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes. Nat Commun, 2017, 8, 14560 doi: 10.1038/ncomms14560
[9]	Kim S, Kwon H J, Lee S, et al. Low-power flexible organic light-emitting diode display device. Adv Mater, 2011, 23(31), 3511 doi: 10.1002/adma.201101066
[10]	Sekitani T, Nakajima H, Maeda H, et al. Stretchable active-matrix organic light-emitting diode display using printable elastic conductors. Nat Mater, 2009, 8(6), 494 doi: 10.1038/nmat2459
[11]	Geffroy B, Le Roy P, Prat C. Organic light-emitting diode (OLED) technology: materials, devices and display technologies. Polym Int, 2006, 55(6), 572 doi: 10.1002/pi.1974
[12]	Sun Z, Liu Z, Li J, et al. Infrared photodetectors based on CVD-grown graphene and PbS quantum dots with ultrahigh responsivity. Adv Mater, 2012, 24(43), 5878 doi: 10.1002/adma.201202220
[13]	Tao L, Chen Z, Li X, et al. Hybrid graphene tunneling photoconductor with interface engineering towards fast photoresponse and high responsivity. npj 2D Mater Appl, 2017, 1(1), 19 doi: 10.1038/s41699-017-0016-4
[14]	Sun Y L, Xie D, Sun M, et al. Hybrid graphene/cadmium-free ZnSe/ZnS quantum dots phototransistors for UV detection. Sci Rep, 2018, 8(1), 5107 doi: 10.1038/s41598-018-23507-y
[15]	Sun T, Wang Y, Yu W, et al. Flexible broadband graphene photodetectors enhanced by plasmonic Cu3–xP colloidal nanocrystals. Small, 2017, 13(42), 1701881 doi: 10.1002/smll.201701881
[16]	Kim R H, Kim D H, Xiao J, et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nat Mater, 2010, 9(11), 929 doi: 10.1038/nmat2879
[17]	Gao D, Wang W, Liang Z, et al. Design of micro, flexible light-emitting diode arrays and fabrication of flexible electrodes. J Phys D, 2016, 49(40), 405108 doi: 10.1088/0022-3727/49/40/405108
[18]	Shervin S, Kim S H, Asadirad M, et al. Bendable III–N visible light-emitting diodes beyond mechanical flexibility: Theoretical study on quantum efficiency improvement and color tunability by external strain. ACS Photon, 2016, 3(3), 486 doi: 10.1021/acsphotonics.5b00745
[19]	Lin C F, Su C L, Wu H M, et al. Bendable InGaN light-emitting nanomembranes with tunable emission wavelength. ACS Appl Mater Inter, 2018, 10(43), 37725 doi: 10.1021/acsami.8b14506

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Received: 03 August 2019 Revised: 08 October 2019 Online: Accepted Manuscript: 15 November 2019Uncorrected proof: 18 November 2019Published: 01 March 2020

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Article Navigation >  Journal of Semiconductors  > 2020  >  41(3): 032302

Qiaoli Liu, Yajie Feng, Huijun Tian, Xiaoying He, Anqi Hu, Xia Guo. Fabrication of flexible AlGaInP LED[J]. Journal of Semiconductors, 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302 ****Q L Liu, Y J Feng, H J Tian, X Y He, A Q Hu, X Guo, Fabrication of flexible AlGaInP LED[J]. J. Semicond., 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302.

Citation:

Qiaoli Liu, Yajie Feng, Huijun Tian, Xiaoying He, Anqi Hu, Xia Guo. Fabrication of flexible AlGaInP LED[J]. Journal of Semiconductors, 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302 **** Q L Liu, Y J Feng, H J Tian, X Y He, A Q Hu, X Guo, Fabrication of flexible AlGaInP LED[J]. J. Semicond., 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302.

Qiaoli Liu, Yajie Feng, Huijun Tian, Xiaoying He, Anqi Hu, Xia Guo. Fabrication of flexible AlGaInP LED[J]. Journal of Semiconductors, 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302 ****Q L Liu, Y J Feng, H J Tian, X Y He, A Q Hu, X Guo, Fabrication of flexible AlGaInP LED[J]. J. Semicond., 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302.

Citation:

Qiaoli Liu, Yajie Feng, Huijun Tian, Xiaoying He, Anqi Hu, Xia Guo. Fabrication of flexible AlGaInP LED[J]. Journal of Semiconductors, 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302 **** Q L Liu, Y J Feng, H J Tian, X Y He, A Q Hu, X Guo, Fabrication of flexible AlGaInP LED[J]. J. Semicond., 2020, 41(3): 032302. doi: 10.1088/1674-4926/41/3/032302.

PDF( 1208 KB)

Fabrication of flexible AlGaInP LED

DOI: 10.1088/1674-4926/41/3/032302

• Qiaoli Liu^1,2, 
• Yajie Feng², 
• Huijun Tian³, 
• Xiaoying He¹, 
• Anqi Hu¹, 
• Xia Guo^1, 

• 1.

  School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China

• 2.

  School of Information, Beijing University of Technology, Beijing 100124, China

• 3.

  Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

More Information

• Corresponding author: Email: guox@bupt.edu.cn
• Received Date: 2019-08-03
  
• Revised Date: 2019-10-08
• Published Date: 2020-03-01

Abstract

• Abstract

  Flexible light-emitting diodes (LEDs) are highly desired for wearable devices, flexible displays, robotics, biomedicine, etc. Traditionally, the transfer process of an ultrathin wafer of about 10–30 μm to a flexible substrate is utilized. However, the yield is low, and it is not applicable to thick GaN LED chips with a 100 μm sapphire substrate. In this paper, transferable LED chips utilized the mature LED manufacture technique are developed, which possesses the advantage of high yield. The flexible LED array demonstrates good electrical and optical performance.

   

  Keywords:
  • light-emitting diodes (LEDs), 
  • flexible, 
  • transfer, 
  • performance
FullText(HTML)
References(19)

• References

  [1]	Pattison P M, Hansen M, Tsao J Y. LED lighting efficacy: status and directions. Compt Rend Phys, 2018, 19(3), 134 doi: 10.1016/j.crhy.2017.10.013
  [2]	Nair G B, Dhoble S J. A perspective perception on the applications of light-emitting diodes. Luminescence, 2015, 30(8), 1167 doi: 10.1002/bio.2919
  [3]	Hirayama H, Fujikawa S, Kamata N. Recent progress in AlGaN-based deep-UV LEDs. Electron Commun Jpn, 2015, 98(5), 1 doi: 10.1002/ecj.11667
  [4]	Guilhabert B, Massoubre D, Richardson E, et al. Sub-micron lithography using InGaN micro-LEDs: mask-free fabrication of LED arrays. IEEE Photonic Tech Lett, 2012, 24(24), 2221 doi: 10.1109/LPT.2012.2225612
  [5]	Lee S Y, Park K I, Huh C, et al. Water-resistant flexible GaN LED on a liquid crystal polymer substrate for implantable biomedical applications. Nano Energy, 2012, 1(1), 145 doi: 10.1016/j.nanoen.2011.07.001
  [6]	Choi M K, Yang J, Kang K, et al. Wearable red-green-blue quantum dot light-emitting diode array using high-resolution intaglio transfer printing. Nat Commun, 2015, 6, 7149 doi: 10.1038/ncomms8149
  [7]	Kim J, Lee J, Son D, et al. Deformable devices with integrated functional nanomaterials for wearable electronics. Nano Converg, 2016, 3(1), 4 doi: 10.1186/s40580-016-0062-1
  [8]	Zhang Z, Du J, Zhang D, et al. Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes. Nat Commun, 2017, 8, 14560 doi: 10.1038/ncomms14560
  [9]	Kim S, Kwon H J, Lee S, et al. Low-power flexible organic light-emitting diode display device. Adv Mater, 2011, 23(31), 3511 doi: 10.1002/adma.201101066
  [10]	Sekitani T, Nakajima H, Maeda H, et al. Stretchable active-matrix organic light-emitting diode display using printable elastic conductors. Nat Mater, 2009, 8(6), 494 doi: 10.1038/nmat2459
  [11]	Geffroy B, Le Roy P, Prat C. Organic light-emitting diode (OLED) technology: materials, devices and display technologies. Polym Int, 2006, 55(6), 572 doi: 10.1002/pi.1974
  [12]	Sun Z, Liu Z, Li J, et al. Infrared photodetectors based on CVD-grown graphene and PbS quantum dots with ultrahigh responsivity. Adv Mater, 2012, 24(43), 5878 doi: 10.1002/adma.201202220
  [13]	Tao L, Chen Z, Li X, et al. Hybrid graphene tunneling photoconductor with interface engineering towards fast photoresponse and high responsivity. npj 2D Mater Appl, 2017, 1(1), 19 doi: 10.1038/s41699-017-0016-4
  [14]	Sun Y L, Xie D, Sun M, et al. Hybrid graphene/cadmium-free ZnSe/ZnS quantum dots phototransistors for UV detection. Sci Rep, 2018, 8(1), 5107 doi: 10.1038/s41598-018-23507-y
  [15]	Sun T, Wang Y, Yu W, et al. Flexible broadband graphene photodetectors enhanced by plasmonic Cu3–xP colloidal nanocrystals. Small, 2017, 13(42), 1701881 doi: 10.1002/smll.201701881
  [16]	Kim R H, Kim D H, Xiao J, et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nat Mater, 2010, 9(11), 929 doi: 10.1038/nmat2879
  [17]	Gao D, Wang W, Liang Z, et al. Design of micro, flexible light-emitting diode arrays and fabrication of flexible electrodes. J Phys D, 2016, 49(40), 405108 doi: 10.1088/0022-3727/49/40/405108
  [18]	Shervin S, Kim S H, Asadirad M, et al. Bendable III–N visible light-emitting diodes beyond mechanical flexibility: Theoretical study on quantum efficiency improvement and color tunability by external strain. ACS Photon, 2016, 3(3), 486 doi: 10.1021/acsphotonics.5b00745
  [19]	Lin C F, Su C L, Wu H M, et al. Bendable InGaN light-emitting nanomembranes with tunable emission wavelength. ACS Appl Mater Inter, 2018, 10(43), 37725 doi: 10.1021/acsami.8b14506

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• Fig. 1. (Color online) Illustration of fabrication process of flexible LEDs. (a) After Ti/Au layer deposition and photolithography, the bottom n-electrodes are patterned on the polyimide substrate. (b) Application of conductive silver paste. (c) Transfer of LED chips from PVC film to polyimide substrate. (d) BCB coating and then photolithography to expose the top electrodes of LEDs. (e) Top metal layer deposition. (f) Patterned top p-electrodes after photolithography. (g) Schematic cross section of flexible LEDs.
• Fig. 2. (Color online) (a) Metallurgical microscope image of the transferred LED arrays under the current injection of 1 mA. (b) and (c) Side-view images of concave and convex bent LED arrays, respectively.
• Fig. 3. (Color online) (a) Comparison of forward I–V characteristics of transferred LED array before and after bending with the curvature of 5, 8, and 11 mm, respectively. The voltage drop is 2 V under the current injection of 20 mA. (b) EL spectra comparison of the transferred LED under the current injection of 5 mA before and after bending. The red-shift of peak wavelength is due to heat.