SEMICONDUCTOR DEVICES
Yijun Yao1, 3, 4, Canwen Zou1, 3, Haiyang Yu1, 3, Jinjin Guo1, Yaming Li4 and Jianguo Liu1, 2,
Corresponding author: Jianguo Liu, jgliu@semi.ac.cn
Abstract: The frequency stability of free-running semiconductor lasers is influenced by several factors, such as driving current and external operating environment. The frequency stabilization of laser has become an international research hotspot in recent years. This paper reviews active frequency stabilization technologies of laser diodes and elaborates their principles. Based on differences of frequency discrimination curves, these active frequency stabilization technologies are classified into three major types, which are harmonic frequency stabilization, Pound-Drever-Hall (PDH) technology and curve subtraction frequency stabilization. Further, merits and demerits of each technology are compared from aspects of frequency stability and structure complexity. Finally, prospects of frequency stabilization technologies of semiconductor lasers are discussed in detail. Combining several of these methods are future trends, especially the combination of frequency stabilization of F–P cavity. And PID electronic control for optimizing the servo system is generally added in the methods mentioned above.
Key words: semiconductor laser, frequency stabilization, active frequency stabilization, frequency discriminator
| [1] |
Basov N G, Krokhin O N, Popov Y M. Obtainment of the negative temperature state in the p-n junctions of degenerate semiconductors. Zhur Eksptl i Teoret Fiz, 1961, 40: 1879
|
| [2] |
Hall R N, Fenner G E, Kingsley J D, et al. Coherent light emission from GaAs junctions. J Essent Lasers, 1969, 9(9): 186
|
| [3] |
Soda H, Iga K, Kitahara C, et al. GaInAsP/InP surface emitting injection lasers. Jpn J Appl Phys, 1979, 18(12): 2329 doi: 10.1143/JJAP.18.2329
|
| [4] |
Zhou B K, Chen T R. Principles of lasers. Beijing: National Defense Industry Press, 2014
|
| [5] |
Yuan J, Chen W L, Qi X, et al. Design for power supply and frequency stabilization of ECL. J Infrared Laser Eng, 2006, 35: 115
|
| [6] |
Ohtsu M. Frequency stabilization in semiconductor lasers. Opt Quantum Electron, 1988, 20(4): 283 doi: 10.1007/BF00620246
|
| [7] |
Wei L Y, Liu J Chou C, et al. Third harmonic frequency stabilization to acetylene saturated absorption in a hollow-core photonic crystal fiber. IEEE Lasers Electro-Optics, 2014: 1
|
| [8] |
Danylov A A, Light A R, Waldman J, et al. Frequency stabilization of an optically pumped far-infrared laser to the harmonic of a microwave synthesizer. Appl Opt, 2015, 54(35): 10494 doi: 10.1364/AO.54.010494
|
| [9] |
Huang M Q, Zhang K S, Zheng J L, et al. Design of concentric ring bi-detectors to obtain directly the curve of frequency discrimination. Opt Laser Technol, 1995, 27(5): 327 doi: 10.1016/0030-3992(95)98692-L
|
| [10] |
Sun M, Ma H, Wang G, et al. Frequency stabilization of mid-infrared difference frequency laser by iodine molecule absorption. Chin J Lasers, 2014, 41(7): 0702006 doi: 10.3788/CJL
|
| [11] |
Sun X T, Chen W B, et al. Theoretical study on laser frequency stabilization in reference to Fabry–Perot cavity. J Acta Photonica Sinica, 2007, 36(12): 2219
|
| [12] |
Liu B, Liang W, Sun H, et al. Design of frequency stabilization control system based on F–P cavity for semiconductor laser. IEEE International Forum on Strategic Technology, 2011: 390
|
| [13] |
Hu S, Geng W, Yuan D, et al. PDH frequency stabilization signal detection technology. J Infrared Laser Eng, 2013, 42(1): 234
|
| [14] |
Li H, Feng L, Wang J. Influence of Fabry–Perot cavity on frequency discrimination curve in Pound-Drever-Hall method. J Infrared Laser Eng, 2014, 43(11): 317
|
| [15] |
An P, Zheng Y, Li X, et al. Locked frequency accuracy experiment of transmission spectrum of F–P cavity under different sweep frequencies. J Appl Opt, 2014, 35(4): 713
|
| [16] |
Webster S A, Oxborrow M, Gill P. Subhertz-linewidth Nd: YAG laser. Opt Lett, 2004, 29(13): 1497 doi: 10.1364/OL.29.001497
|
| [17] |
Cheng B, Wang Z Y, Wu B, et al. Laser frequency stabilization and shifting by using modulation transfer spectroscopy. Chin Phys B, 2014, 23(10): 242
|
| [18] |
Zuo A B, Li W B, Peng Y X, et al. Research on frequency stabilization of modulation transfer spectroscopy. Chin J Lasers, 2005
|
| [19] |
Bi Z Y. Development of solid state frequency-stabilized mini-laser by using modulation transfer spectroscopy. J Infrared Millimeter Waves, 2002
|
| [20] |
Kiesel N, Blaser F, Grass D, et al. Cavity cooling of an optically levitated submicron particle. Proceedings of the National Academy of Sciences of the United States of America, 2013, 110(35): 14180 doi: 10.1073/pnas.1309167110
|
| [21] |
Grishina V, Winterflood J. Frequency noise suppression in a diode laser locked to a travelling wave resonator incorporating a Brewster prism. J Opt Commun, 2008, 281(6): 1668 doi: 10.1016/j.optcom.2007.11.075
|
| [22] |
Yang H J, Wang Y H, Zhang T C, et al. Modulation-free frequency stabilization of a laser based on a confocal Fabry–Perot cavity. Chin J Lasers, 2006, 33(3): 316
|
| [23] |
Libson A, Brown N, Buikema A, et al. Simple method for locking birefringent resonators. Opt Express, 2015, 23(3): 3809 doi: 10.1364/OE.23.003809
|
| [24] |
Reeves J M, Garcia O, Sackett C A. Temperature stability of a dichroic atomic vapor laser lock. Appl Opt, 2006, 45(2): 372 doi: 10.1364/AO.45.000372
|
| [25] |
Pustelny S, Schultze V, Scholtes T, et al. Dichroic atomic vapor laser lock with multi-gigahertz stabilization range. J Rev Sci Instrum, 2016, 87(6): 401
|
| [26] |
Liu Q, Zhuo Y, Liu C, et al. Frequency stabilization system of diode laser based on DAVLL. J Opt Instrum, 2014, 36(6): 551
|
| [27] |
Singh V, Tiwari V B, Mishra S R, et al. A tunable Doppler-free dichroic lock for laser frequency stabilization. Appl Phys B, 2016, 122(8): 225 doi: 10.1007/s00340-016-6497-6
|
| [28] |
Schuldt T, D?ringshoff K, Kovalchuk E V, et al. Development of a compact optical absolute frequency reference for space with 10-15 instability. Appl Opt, 2017, 56(4): 1101 doi: 10.1364/AO.56.001101
|
| [29] |
Sun L, Li H Q, Xiong J. The comparative analysis of frequency stabilization methods between modulation and non-modulation semiconductor laser. J Opt Instrum, 2015, 37(2): 122
|
| [30] |
Hosoya K, Sato T, Ohkawa M, et al. Frequency stabilization of a semiconductor laser using both Etalon and atomic spectra. J Pediatrics, 2013, 132: S140
|
| [31] |
Fang Z, Cai H, Chen G, et al. Frequency stabilization of semiconductor lasers. J Spectroscopy & Spectral Analysis, 2017, 239: 26
|
| [32] |
Minch J R, Walther F G, Savage S, et al. Frequency stabilization of laser diodes in an aggressive thermal environment. Proc IEEE, 2015, 9354: 93540T
|
| [33] |
Xu Z, Huang K, Lu X. External cavity diode laser with long-term frequency stabilization based on mode boundary detection. IEEE Frequency Control Symposium & the European Frequency and Time Forum, 2015: 606
|
Table 1. Advantages and disadvantages of three methods.
| The methods of frequency stabilization | Advantages and disadvantages |
| Harmonic frequency stabilization | |
| Molecular absorption harmonic frequency stabilization
Harmonic frequency stabilization based on F–P cavity |
Complex system structure, the frequency stability is 10?9[10] Loud noise, weak signal, wide frequency stabilization controlling, simple structure, the frequency stability is 10?8[12] |
| PDH frequency stabilization | |
| Edge frequency locked frequency stabilization based on F–P
Modulation transfer spectroscopy stabilization |
Strong anti-interference ability, frequency stability 10?15[16] Complex system structure, high cost, high precision of frequency locking, the frequency stability is 10?12[19] |
| Curve subtraction frequency stabilization | |
| Modulation-free frequency stabilization based on a confocal F–P cavity | Rely on cavity material, simple structure, frequency stabilization
without modulation dither, frequency stability 10?12[22] |
| Dichroic atomic vapor laser lock(DAVLL)
Doppler-free dichroic lock(DFDL) |
Low precision of frequency lock, sensitive system, easy to lock,
the frequency stability is 10?8[27] Very sensitive to the intensity of magnetic field, restricted application, simple light path, the frequency stability is 10?10[28] |
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| [1] |
Basov N G, Krokhin O N, Popov Y M. Obtainment of the negative temperature state in the p-n junctions of degenerate semiconductors. Zhur Eksptl i Teoret Fiz, 1961, 40: 1879
|
| [2] |
Hall R N, Fenner G E, Kingsley J D, et al. Coherent light emission from GaAs junctions. J Essent Lasers, 1969, 9(9): 186
|
| [3] |
Soda H, Iga K, Kitahara C, et al. GaInAsP/InP surface emitting injection lasers. Jpn J Appl Phys, 1979, 18(12): 2329 doi: 10.1143/JJAP.18.2329
|
| [4] |
Zhou B K, Chen T R. Principles of lasers. Beijing: National Defense Industry Press, 2014
|
| [5] |
Yuan J, Chen W L, Qi X, et al. Design for power supply and frequency stabilization of ECL. J Infrared Laser Eng, 2006, 35: 115
|
| [6] |
Ohtsu M. Frequency stabilization in semiconductor lasers. Opt Quantum Electron, 1988, 20(4): 283 doi: 10.1007/BF00620246
|
| [7] |
Wei L Y, Liu J Chou C, et al. Third harmonic frequency stabilization to acetylene saturated absorption in a hollow-core photonic crystal fiber. IEEE Lasers Electro-Optics, 2014: 1
|
| [8] |
Danylov A A, Light A R, Waldman J, et al. Frequency stabilization of an optically pumped far-infrared laser to the harmonic of a microwave synthesizer. Appl Opt, 2015, 54(35): 10494 doi: 10.1364/AO.54.010494
|
| [9] |
Huang M Q, Zhang K S, Zheng J L, et al. Design of concentric ring bi-detectors to obtain directly the curve of frequency discrimination. Opt Laser Technol, 1995, 27(5): 327 doi: 10.1016/0030-3992(95)98692-L
|
| [10] |
Sun M, Ma H, Wang G, et al. Frequency stabilization of mid-infrared difference frequency laser by iodine molecule absorption. Chin J Lasers, 2014, 41(7): 0702006 doi: 10.3788/CJL
|
| [11] |
Sun X T, Chen W B, et al. Theoretical study on laser frequency stabilization in reference to Fabry–Perot cavity. J Acta Photonica Sinica, 2007, 36(12): 2219
|
| [12] |
Liu B, Liang W, Sun H, et al. Design of frequency stabilization control system based on F–P cavity for semiconductor laser. IEEE International Forum on Strategic Technology, 2011: 390
|
| [13] |
Hu S, Geng W, Yuan D, et al. PDH frequency stabilization signal detection technology. J Infrared Laser Eng, 2013, 42(1): 234
|
| [14] |
Li H, Feng L, Wang J. Influence of Fabry–Perot cavity on frequency discrimination curve in Pound-Drever-Hall method. J Infrared Laser Eng, 2014, 43(11): 317
|
| [15] |
An P, Zheng Y, Li X, et al. Locked frequency accuracy experiment of transmission spectrum of F–P cavity under different sweep frequencies. J Appl Opt, 2014, 35(4): 713
|
| [16] |
Webster S A, Oxborrow M, Gill P. Subhertz-linewidth Nd: YAG laser. Opt Lett, 2004, 29(13): 1497 doi: 10.1364/OL.29.001497
|
| [17] |
Cheng B, Wang Z Y, Wu B, et al. Laser frequency stabilization and shifting by using modulation transfer spectroscopy. Chin Phys B, 2014, 23(10): 242
|
| [18] |
Zuo A B, Li W B, Peng Y X, et al. Research on frequency stabilization of modulation transfer spectroscopy. Chin J Lasers, 2005
|
| [19] |
Bi Z Y. Development of solid state frequency-stabilized mini-laser by using modulation transfer spectroscopy. J Infrared Millimeter Waves, 2002
|
| [20] |
Kiesel N, Blaser F, Grass D, et al. Cavity cooling of an optically levitated submicron particle. Proceedings of the National Academy of Sciences of the United States of America, 2013, 110(35): 14180 doi: 10.1073/pnas.1309167110
|
| [21] |
Grishina V, Winterflood J. Frequency noise suppression in a diode laser locked to a travelling wave resonator incorporating a Brewster prism. J Opt Commun, 2008, 281(6): 1668 doi: 10.1016/j.optcom.2007.11.075
|
| [22] |
Yang H J, Wang Y H, Zhang T C, et al. Modulation-free frequency stabilization of a laser based on a confocal Fabry–Perot cavity. Chin J Lasers, 2006, 33(3): 316
|
| [23] |
Libson A, Brown N, Buikema A, et al. Simple method for locking birefringent resonators. Opt Express, 2015, 23(3): 3809 doi: 10.1364/OE.23.003809
|
| [24] |
Reeves J M, Garcia O, Sackett C A. Temperature stability of a dichroic atomic vapor laser lock. Appl Opt, 2006, 45(2): 372 doi: 10.1364/AO.45.000372
|
| [25] |
Pustelny S, Schultze V, Scholtes T, et al. Dichroic atomic vapor laser lock with multi-gigahertz stabilization range. J Rev Sci Instrum, 2016, 87(6): 401
|
| [26] |
Liu Q, Zhuo Y, Liu C, et al. Frequency stabilization system of diode laser based on DAVLL. J Opt Instrum, 2014, 36(6): 551
|
| [27] |
Singh V, Tiwari V B, Mishra S R, et al. A tunable Doppler-free dichroic lock for laser frequency stabilization. Appl Phys B, 2016, 122(8): 225 doi: 10.1007/s00340-016-6497-6
|
| [28] |
Schuldt T, D?ringshoff K, Kovalchuk E V, et al. Development of a compact optical absolute frequency reference for space with 10-15 instability. Appl Opt, 2017, 56(4): 1101 doi: 10.1364/AO.56.001101
|
| [29] |
Sun L, Li H Q, Xiong J. The comparative analysis of frequency stabilization methods between modulation and non-modulation semiconductor laser. J Opt Instrum, 2015, 37(2): 122
|
| [30] |
Hosoya K, Sato T, Ohkawa M, et al. Frequency stabilization of a semiconductor laser using both Etalon and atomic spectra. J Pediatrics, 2013, 132: S140
|
| [31] |
Fang Z, Cai H, Chen G, et al. Frequency stabilization of semiconductor lasers. J Spectroscopy & Spectral Analysis, 2017, 239: 26
|
| [32] |
Minch J R, Walther F G, Savage S, et al. Frequency stabilization of laser diodes in an aggressive thermal environment. Proc IEEE, 2015, 9354: 93540T
|
| [33] |
Xu Z, Huang K, Lu X. External cavity diode laser with long-term frequency stabilization based on mode boundary detection. IEEE Frequency Control Symposium & the European Frequency and Time Forum, 2015: 606
|
Article views: 4791 Times PDF downloads: 110 Times Cited by: 0 Times
Received: 22 March 2018 Revised: 18 April 2018 Online: Uncorrected proof: 31 May 2018Published: 01 November 2018
| Citation: |
Yijun Yao, Canwen Zou, Haiyang Yu, Jinjin Guo, Yaming Li, Jianguo Liu. The developing condition analysis of semiconductor laser frequency stabilization technology[J]. Journal of Semiconductors, 2018, 39(11): 114004. doi: 10.1088/1674-4926/39/11/114004
****
Y J Yao, C W Zou, H Y Yu, J J Guo, Y M Li, J G Liu, The developing condition analysis of semiconductor laser frequency stabilization technology[J]. J. Semicond., 2018, 39(11): 114004. doi: 10.1088/1674-4926/39/11/114004.
|
Project supported by the National Ministry of Science and Technology and Key Research Project 973 (Nos. 2014CB340102, 2017YFF0104601), the Preeminence Youth Fund of China (No. 61625504), and the National Natural Science Foundation of China (Nos. 61527820, 11674313, 61535014, 61727815).
| [1] |
Basov N G, Krokhin O N, Popov Y M. Obtainment of the negative temperature state in the p-n junctions of degenerate semiconductors. Zhur Eksptl i Teoret Fiz, 1961, 40: 1879
|
| [2] |
Hall R N, Fenner G E, Kingsley J D, et al. Coherent light emission from GaAs junctions. J Essent Lasers, 1969, 9(9): 186
|
| [3] |
Soda H, Iga K, Kitahara C, et al. GaInAsP/InP surface emitting injection lasers. Jpn J Appl Phys, 1979, 18(12): 2329 doi: 10.1143/JJAP.18.2329
|
| [4] |
Zhou B K, Chen T R. Principles of lasers. Beijing: National Defense Industry Press, 2014
|
| [5] |
Yuan J, Chen W L, Qi X, et al. Design for power supply and frequency stabilization of ECL. J Infrared Laser Eng, 2006, 35: 115
|
| [6] |
Ohtsu M. Frequency stabilization in semiconductor lasers. Opt Quantum Electron, 1988, 20(4): 283 doi: 10.1007/BF00620246
|
| [7] |
Wei L Y, Liu J Chou C, et al. Third harmonic frequency stabilization to acetylene saturated absorption in a hollow-core photonic crystal fiber. IEEE Lasers Electro-Optics, 2014: 1
|
| [8] |
Danylov A A, Light A R, Waldman J, et al. Frequency stabilization of an optically pumped far-infrared laser to the harmonic of a microwave synthesizer. Appl Opt, 2015, 54(35): 10494 doi: 10.1364/AO.54.010494
|
| [9] |
Huang M Q, Zhang K S, Zheng J L, et al. Design of concentric ring bi-detectors to obtain directly the curve of frequency discrimination. Opt Laser Technol, 1995, 27(5): 327 doi: 10.1016/0030-3992(95)98692-L
|
| [10] |
Sun M, Ma H, Wang G, et al. Frequency stabilization of mid-infrared difference frequency laser by iodine molecule absorption. Chin J Lasers, 2014, 41(7): 0702006 doi: 10.3788/CJL
|
| [11] |
Sun X T, Chen W B, et al. Theoretical study on laser frequency stabilization in reference to Fabry–Perot cavity. J Acta Photonica Sinica, 2007, 36(12): 2219
|
| [12] |
Liu B, Liang W, Sun H, et al. Design of frequency stabilization control system based on F–P cavity for semiconductor laser. IEEE International Forum on Strategic Technology, 2011: 390
|
| [13] |
Hu S, Geng W, Yuan D, et al. PDH frequency stabilization signal detection technology. J Infrared Laser Eng, 2013, 42(1): 234
|
| [14] |
Li H, Feng L, Wang J. Influence of Fabry–Perot cavity on frequency discrimination curve in Pound-Drever-Hall method. J Infrared Laser Eng, 2014, 43(11): 317
|
| [15] |
An P, Zheng Y, Li X, et al. Locked frequency accuracy experiment of transmission spectrum of F–P cavity under different sweep frequencies. J Appl Opt, 2014, 35(4): 713
|
| [16] |
Webster S A, Oxborrow M, Gill P. Subhertz-linewidth Nd: YAG laser. Opt Lett, 2004, 29(13): 1497 doi: 10.1364/OL.29.001497
|
| [17] |
Cheng B, Wang Z Y, Wu B, et al. Laser frequency stabilization and shifting by using modulation transfer spectroscopy. Chin Phys B, 2014, 23(10): 242
|
| [18] |
Zuo A B, Li W B, Peng Y X, et al. Research on frequency stabilization of modulation transfer spectroscopy. Chin J Lasers, 2005
|
| [19] |
Bi Z Y. Development of solid state frequency-stabilized mini-laser by using modulation transfer spectroscopy. J Infrared Millimeter Waves, 2002
|
| [20] |
Kiesel N, Blaser F, Grass D, et al. Cavity cooling of an optically levitated submicron particle. Proceedings of the National Academy of Sciences of the United States of America, 2013, 110(35): 14180 doi: 10.1073/pnas.1309167110
|
| [21] |
Grishina V, Winterflood J. Frequency noise suppression in a diode laser locked to a travelling wave resonator incorporating a Brewster prism. J Opt Commun, 2008, 281(6): 1668 doi: 10.1016/j.optcom.2007.11.075
|
| [22] |
Yang H J, Wang Y H, Zhang T C, et al. Modulation-free frequency stabilization of a laser based on a confocal Fabry–Perot cavity. Chin J Lasers, 2006, 33(3): 316
|
| [23] |
Libson A, Brown N, Buikema A, et al. Simple method for locking birefringent resonators. Opt Express, 2015, 23(3): 3809 doi: 10.1364/OE.23.003809
|
| [24] |
Reeves J M, Garcia O, Sackett C A. Temperature stability of a dichroic atomic vapor laser lock. Appl Opt, 2006, 45(2): 372 doi: 10.1364/AO.45.000372
|
| [25] |
Pustelny S, Schultze V, Scholtes T, et al. Dichroic atomic vapor laser lock with multi-gigahertz stabilization range. J Rev Sci Instrum, 2016, 87(6): 401
|
| [26] |
Liu Q, Zhuo Y, Liu C, et al. Frequency stabilization system of diode laser based on DAVLL. J Opt Instrum, 2014, 36(6): 551
|
| [27] |
Singh V, Tiwari V B, Mishra S R, et al. A tunable Doppler-free dichroic lock for laser frequency stabilization. Appl Phys B, 2016, 122(8): 225 doi: 10.1007/s00340-016-6497-6
|
| [28] |
Schuldt T, D?ringshoff K, Kovalchuk E V, et al. Development of a compact optical absolute frequency reference for space with 10-15 instability. Appl Opt, 2017, 56(4): 1101 doi: 10.1364/AO.56.001101
|
| [29] |
Sun L, Li H Q, Xiong J. The comparative analysis of frequency stabilization methods between modulation and non-modulation semiconductor laser. J Opt Instrum, 2015, 37(2): 122
|
| [30] |
Hosoya K, Sato T, Ohkawa M, et al. Frequency stabilization of a semiconductor laser using both Etalon and atomic spectra. J Pediatrics, 2013, 132: S140
|
| [31] |
Fang Z, Cai H, Chen G, et al. Frequency stabilization of semiconductor lasers. J Spectroscopy & Spectral Analysis, 2017, 239: 26
|
| [32] |
Minch J R, Walther F G, Savage S, et al. Frequency stabilization of laser diodes in an aggressive thermal environment. Proc IEEE, 2015, 9354: 93540T
|
| [33] |
Xu Z, Huang K, Lu X. External cavity diode laser with long-term frequency stabilization based on mode boundary detection. IEEE Frequency Control Symposium & the European Frequency and Time Forum, 2015: 606
|
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