SEMICONDUCTOR TECHNOLOGY
Yunfei Qi1, 2, Pengfei Zhao2, , Yulong Wu1, 2, Yongqi Chen1, 2 and Yonggang Zou1,
Corresponding author: Pengfei Zhao Email: pfzhao@semi.ac.cn; Yonggang Zou zouyg@cust.edu.cn
Abstract: We represent a design of a 20 W, fiber-coupled diode laser module based on 26 single emitters at 520 nm. The module can produce more than 20 W output power from a standard fiber with core diameter of 400 μm and numerical aperture (NA) of 0.22. To achieve a 20 W laser beam, the spatial beam combination and polarization beam combination by polarization beam splitter are used to combine output of 26 single emitters into a single beam, and then an aspheric lens is used to couple the combined beam into an optical fiber. The simulation shows that the total coupling efficiency is more than 95%.
Key words: laser diode, green light, single emitter, combination technology
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Liu R C, Liu Y Y, Chen X, et al. Beam multiplexing of diode laser arrays. J Semicond, 2015, 36(4):044008 doi: 10.1088/1674-4926/36/4/044008
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Wang X W, Fang G Z, Ma X Y, et al. Fiber array packaged bar of output power up to 30 W. J Semicond, 2004, 25(5):579 http://en.cnki.com.cn/Article_en/CJFDTOTAL-BDTX200405018.htm
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Wang X W, Xiao J W, Wang Z M, et al. High brightness, high power density fiber coupling of high power laser diode. J Semicond, 2001, 22(9):1112 http://www.oalib.com/paper/1520702
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Bastian K, Haro F, Holger K, et al. Beam combining techniques for high-power high-brightness diode lasers. Proc SPIE, 2015, 9346:934614 doi: 10.1117/12.2079553
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Stefan H, Haro F, Bastian K, et al. Compact high brightness diode laser emitting 500 W from a 100μm fiber. Proc SPIE, 2013, 8605:86050Q doi: 10.1117/12.2003299
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| [6] |
Marty H, Wolfram U, Kylan H, et al. High-brightness fiber-coupled pump modules in fiber laser applications. Proc SPIE, 2014, 8961:18 https://www.rp-photonics.com/fiber_coupled_diode_lasers.html
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Tomoyuki H, Jiro S, Naoya I, et al. High-brightness blue direct diode laser. SHIMADZU Rev, 2014, 71:11 http://ci.nii.ac.jp/naid/40020227425
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Andreas U, Bernd K, Jens B. High-power visible spectrum diode lasers for display and medical applications-beam sources with tailored beam quality and spectral characteristics. Proc SPIE, 2014, 8965:896513 doi: 10.1117/12.2039718
|
| [9] |
Adrian A, Teresa L, Jens M, et al. True green laser diode at 524 nm with 50 mW continuous wave output power on c-plane GaN. Appl Phys Express 2010, 3:061003 doi: 10.1007/978-3-642-24538-1_5
|
| [10] |
Yusuke Y, Masahiro A, Yohei E, et al. Continuous-wave operation of 520 nm green InGaN-based laser diodes on semi-polar {2021} GaN substrates. Appl Phys Express, 2009, 2:082101 doi: 10.1143/APEX.2.082101
|
| [11] |
Takashi M, Shingo M, Takeshi O, et al. 510-515 nm InGaN-based green laser diodes on c-plane GaN substrate. Appl Phys Express, 2009, 2:062201 doi: 10.1143/APEX.2.062201
|
| [12] |
Ma X H, Shi Q L, Xu L, et al. High power laser diode fiber coupled module. Infrared Laser Eng, 2009, 38(4):675 doi: 10.1117/12.764361
|
| [13] |
Hu L M, Zhu H B, Wang L J. High-brightness pumping module of fiber coupled diode laser. Infrared Laser Eng, 2013, 42(2):36ce2 http://en.cnki.com.cn/Article_en/CJFDTOTAL-HWYJ201302018.htm
|
| [14] |
Karlsen S R, Price R K, Reynolds M, et al. 100-W, 105-μm, 0.15 NA fiber coupled laser diode module. Proc SPIE, 2009, 7198:29 doi: 10.1007/s00340-014-5872-4
|
| [15] |
Niu B, Wang B H, Guo W R, et al. Description and evaluation of beam quality of single emitter diode laser based on beam parameter product. Chin J Lasers, 2015, 42:0202004 doi: 10.3788/CJL
|
Table 1. Single emitter parameters
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| [1] |
Liu R C, Liu Y Y, Chen X, et al. Beam multiplexing of diode laser arrays. J Semicond, 2015, 36(4):044008 doi: 10.1088/1674-4926/36/4/044008
|
| [2] |
Wang X W, Fang G Z, Ma X Y, et al. Fiber array packaged bar of output power up to 30 W. J Semicond, 2004, 25(5):579 http://en.cnki.com.cn/Article_en/CJFDTOTAL-BDTX200405018.htm
|
| [3] |
Wang X W, Xiao J W, Wang Z M, et al. High brightness, high power density fiber coupling of high power laser diode. J Semicond, 2001, 22(9):1112 http://www.oalib.com/paper/1520702
|
| [4] |
Bastian K, Haro F, Holger K, et al. Beam combining techniques for high-power high-brightness diode lasers. Proc SPIE, 2015, 9346:934614 doi: 10.1117/12.2079553
|
| [5] |
Stefan H, Haro F, Bastian K, et al. Compact high brightness diode laser emitting 500 W from a 100μm fiber. Proc SPIE, 2013, 8605:86050Q doi: 10.1117/12.2003299
|
| [6] |
Marty H, Wolfram U, Kylan H, et al. High-brightness fiber-coupled pump modules in fiber laser applications. Proc SPIE, 2014, 8961:18 https://www.rp-photonics.com/fiber_coupled_diode_lasers.html
|
| [7] |
Tomoyuki H, Jiro S, Naoya I, et al. High-brightness blue direct diode laser. SHIMADZU Rev, 2014, 71:11 http://ci.nii.ac.jp/naid/40020227425
|
| [8] |
Andreas U, Bernd K, Jens B. High-power visible spectrum diode lasers for display and medical applications-beam sources with tailored beam quality and spectral characteristics. Proc SPIE, 2014, 8965:896513 doi: 10.1117/12.2039718
|
| [9] |
Adrian A, Teresa L, Jens M, et al. True green laser diode at 524 nm with 50 mW continuous wave output power on c-plane GaN. Appl Phys Express 2010, 3:061003 doi: 10.1007/978-3-642-24538-1_5
|
| [10] |
Yusuke Y, Masahiro A, Yohei E, et al. Continuous-wave operation of 520 nm green InGaN-based laser diodes on semi-polar {2021} GaN substrates. Appl Phys Express, 2009, 2:082101 doi: 10.1143/APEX.2.082101
|
| [11] |
Takashi M, Shingo M, Takeshi O, et al. 510-515 nm InGaN-based green laser diodes on c-plane GaN substrate. Appl Phys Express, 2009, 2:062201 doi: 10.1143/APEX.2.062201
|
| [12] |
Ma X H, Shi Q L, Xu L, et al. High power laser diode fiber coupled module. Infrared Laser Eng, 2009, 38(4):675 doi: 10.1117/12.764361
|
| [13] |
Hu L M, Zhu H B, Wang L J. High-brightness pumping module of fiber coupled diode laser. Infrared Laser Eng, 2013, 42(2):36ce2 http://en.cnki.com.cn/Article_en/CJFDTOTAL-HWYJ201302018.htm
|
| [14] |
Karlsen S R, Price R K, Reynolds M, et al. 100-W, 105-μm, 0.15 NA fiber coupled laser diode module. Proc SPIE, 2009, 7198:29 doi: 10.1007/s00340-014-5872-4
|
| [15] |
Niu B, Wang B H, Guo W R, et al. Description and evaluation of beam quality of single emitter diode laser based on beam parameter product. Chin J Lasers, 2015, 42:0202004 doi: 10.3788/CJL
|
Article views: 4952 Times PDF downloads: 84 Times Cited by: 0 Times
Received: 25 October 2016 Revised: 25 October 2016 Online: Published: 01 September 2017
| Citation: |
Yunfei Qi, Pengfei Zhao, Yulong Wu, Yongqi Chen, Yonggang Zou. Design of 20 W fiber-coupled green laser diode by Zemax[J]. Journal of Semiconductors, 2017, 38(9): 096002. doi: 10.1088/1674-4926/38/9/096002
****
Y F Qi, P F Zhao, Y L Wu, Y Q Chen, Y G Zou. Design of 20 W fiber-coupled green laser diode by Zemax[J]. J. Semicond., 2017, 38(9): 096002. doi: 10.1088/1674-4926/38/9/096002.
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the National Key R&D Program of China No.2016YFB0402105
Project supported by the National Key R&D Program of China (No.2016YFB0402105), the Key Deployment Program of the Chinese Academy of Sciences (No.KGZD-SW-T01-2), and the National Natural Science Foundation of China (No.61404135)
the Key Deployment Program of the Chinese Academy of Sciences No.KGZD-SW-T01-2
the National Natural Science Foundation of China No.61404135
| [1] |
Liu R C, Liu Y Y, Chen X, et al. Beam multiplexing of diode laser arrays. J Semicond, 2015, 36(4):044008 doi: 10.1088/1674-4926/36/4/044008
|
| [2] |
Wang X W, Fang G Z, Ma X Y, et al. Fiber array packaged bar of output power up to 30 W. J Semicond, 2004, 25(5):579 http://en.cnki.com.cn/Article_en/CJFDTOTAL-BDTX200405018.htm
|
| [3] |
Wang X W, Xiao J W, Wang Z M, et al. High brightness, high power density fiber coupling of high power laser diode. J Semicond, 2001, 22(9):1112 http://www.oalib.com/paper/1520702
|
| [4] |
Bastian K, Haro F, Holger K, et al. Beam combining techniques for high-power high-brightness diode lasers. Proc SPIE, 2015, 9346:934614 doi: 10.1117/12.2079553
|
| [5] |
Stefan H, Haro F, Bastian K, et al. Compact high brightness diode laser emitting 500 W from a 100μm fiber. Proc SPIE, 2013, 8605:86050Q doi: 10.1117/12.2003299
|
| [6] |
Marty H, Wolfram U, Kylan H, et al. High-brightness fiber-coupled pump modules in fiber laser applications. Proc SPIE, 2014, 8961:18 https://www.rp-photonics.com/fiber_coupled_diode_lasers.html
|
| [7] |
Tomoyuki H, Jiro S, Naoya I, et al. High-brightness blue direct diode laser. SHIMADZU Rev, 2014, 71:11 http://ci.nii.ac.jp/naid/40020227425
|
| [8] |
Andreas U, Bernd K, Jens B. High-power visible spectrum diode lasers for display and medical applications-beam sources with tailored beam quality and spectral characteristics. Proc SPIE, 2014, 8965:896513 doi: 10.1117/12.2039718
|
| [9] |
Adrian A, Teresa L, Jens M, et al. True green laser diode at 524 nm with 50 mW continuous wave output power on c-plane GaN. Appl Phys Express 2010, 3:061003 doi: 10.1007/978-3-642-24538-1_5
|
| [10] |
Yusuke Y, Masahiro A, Yohei E, et al. Continuous-wave operation of 520 nm green InGaN-based laser diodes on semi-polar {2021} GaN substrates. Appl Phys Express, 2009, 2:082101 doi: 10.1143/APEX.2.082101
|
| [11] |
Takashi M, Shingo M, Takeshi O, et al. 510-515 nm InGaN-based green laser diodes on c-plane GaN substrate. Appl Phys Express, 2009, 2:062201 doi: 10.1143/APEX.2.062201
|
| [12] |
Ma X H, Shi Q L, Xu L, et al. High power laser diode fiber coupled module. Infrared Laser Eng, 2009, 38(4):675 doi: 10.1117/12.764361
|
| [13] |
Hu L M, Zhu H B, Wang L J. High-brightness pumping module of fiber coupled diode laser. Infrared Laser Eng, 2013, 42(2):36ce2 http://en.cnki.com.cn/Article_en/CJFDTOTAL-HWYJ201302018.htm
|
| [14] |
Karlsen S R, Price R K, Reynolds M, et al. 100-W, 105-μm, 0.15 NA fiber coupled laser diode module. Proc SPIE, 2009, 7198:29 doi: 10.1007/s00340-014-5872-4
|
| [15] |
Niu B, Wang B H, Guo W R, et al. Description and evaluation of beam quality of single emitter diode laser based on beam parameter product. Chin J Lasers, 2015, 42:0202004 doi: 10.3788/CJL
|
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