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J. Semicond. > 2024, Volume 45?>?Issue 11?> 112301

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Design and characterization of a multi-ring nested CMUT array for hydrophone

Licheng Jia, Rihui Xue and Fansheng Meng

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 Corresponding author: Licheng Jia, jialicheng@nuc.edu.cn

DOI: 10.1088/1674-4926/24060007

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Abstract: This paper presents the design, fabrication, packaging, and characterization of a high-performance CMUT array. The array, which features rectangular cells fabricated using a sacrificial release process, achieves a receiving sensitivity of ?231.44 dB (re: 1 V/μPa) with a 40 dB gain. Notably, the CMUT array exhibits a minimal sensitivity variation of just 0.87 dB across a temperature range of 0 to 60 °C. Furthermore, the output voltage non-linearity at 1 kHz is approximately 0.44%. These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers. The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications.

Key words: cmut array, mirco-electro-mechanical systems (mems), receiving sensitivity, non-linearity



[1]
Jia L, He C, Xue C, et al. The device characteristics and fabrication method of 72-element CMUT array for long-range underwater imaging applications. Microsyst Technol, 2019, 25, 1195 doi: 10.1007/s00542-018-4062-4
[2]
Stojanovic M, and Preisig J. Underwater acoustic communication channels: Propagation models and statistical characterization. IEEE Commun Mag, 2009, 47, 84 doi: 10.1109/MCOM.2009.4752682
[3]
Herrera B, Pop F, Cassella C, et al. Miniaturized PMUT-based receiver for underwater acoustic networking. J Microelectromech S, 2020, 29, 832 doi: 10.1109/JMEMS.2020.3018070
[4]
Almeida R, Cruz N, and Matos A. Synchronized intelligent buoy network for underwater positioning. In Proceedings of the OMAE2010 29th International Conference on Ocean, 2010, 1 doi: 10.1109/OCEANS.2010.5663995
[5]
Francois D, Royer J, Perrot J. Long-term autonomous hydrophones for large-scale hydroacoustic monitoring of the oceans. In Proceedings of the 2012OCEANS, Yeosu, 2012, 1 doi: 10.1109/OCEANS-Yeosu.2012.6263519
[6]
Przybyla R, Flynn A, Jain V, et al. A micromechanical ultrasonic distance sensor with > 1 meter range. In Proceedings of the 16th International Conference on Solid-State Sensors, 2011, 2070 doi: 10.1109/TRANSDUCERS.2011.5969226
[7]
Benthowave Instrument Inc, Product Datasheet. [Online]. Available: https://www.benthowave.com/products/BII-7150Hydrophone.html
[8]
DolphinEar Hydrophones, Product Datasheet. [Online]. Available: http://www.dolphinear.com/de200.html
[9]
H2a Hydrophone User's Guide, Aquarian Audio, Anacortes, WA, USA
[10]
Brüel & Kjser. Hydrophones-Types 8103, 8104, 8105 and 8106. Sep, 2017
[11]
Liao W, Ren T, Yang Y, et al. Novel device design for an ultrasonic ranging system. Integr Ferroelectr, 2009, 105, 53 doi: 10.1080/10584580903039257
[12]
Jia L, Shi L, Liu C, et al. Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture. IEEE T Electron Dev, 2021, 68, 4656 doi: 10.1109/TED.2021.3093020
[13]
Jia L, Shi L, Lu Z, et al. A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure. IEEE Electr Device L, 2021, 42, 1845 doi: 10.1109/LED.2021.3120806
[14]
Yaralioglu G, Ergun A, Bayram B, et al. Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers. IEEE T Ultrason Ferr, 2003, 50, 449 doi: 10.1109/TUFFC.2003.1197968
[15]
Khuri-Yakub B, Oralkan ?. Capacitive micromachined ultrasonic transducers for medical imaging and therapy. J Micromech Microeng, 2011, 21, 054004 doi: 10.1088/0960-1317/21/5/054004
Fig. 1.  (Color online) Schematic of a CMUT fabricated using a sacrificial release process.

Fig. 2.  Equivalent receiving circuit model for a sensing cell of the CMUT array, which includes a voltage-mode amplification circuit.

Fig. 3.  (Color online) Process flow of fabricating CMUT array using the sacrificial release method. (a) Substrate with oxide and patterning electrode connection layer. (b) Bottom electrode deposition and patterning. (c) Defining device cavity. (d) Contact hole opening to access the electrode connection layer. (e) Top electrode deposition and patterning. (f) Cavity etch. (g) Silicon nitride to form device diaphragm. (h) Contact holes opening to access the electrode connection layer.

Fig. 4.  (Color online) Optical images of a fabricated CMUT array with a magnified image of one sensing cell. The CMUT array size is 1.5 mm × 1.5 mm.

Fig. 5.  (Color online) The CMUT wafers.

Fig. 6.  (Color online) The measured receiving sensitivity under different frequencies for the CMUT array.

Fig. 7.  (Color online) Measured acoustic pressure sensitivity of the CMUT array in the temperature range from 0 to 60 °C.

Fig. 8.  (Color online) Non-linearity measurement obtained by sweeping the acoustic pressure up to 200 kPa at 1 kHz, which shows the maximum non-linearity to be about 0.44%.

Table 1.   Material properties used in the simulations.

Property Si?N? SiO?
Young's modulus (GPa) 110 73
Poisson's ratio 0.27 0.17
Dielectric permittivity 5.4 3.7
Density (kg/m3) 3100 2329
DownLoad: CSV

Table 2.   Detailed design parameters of CMUTs array.

Parameter Value
Array length (mm) 1.5
Array width (mm) 1.5
Diaphragm length (μm) 48
Diaphragm width (μm) 27
Electrode thickness (nm) 400
Vacuum gap height (nm) 50
Number of cells per array 1375
DownLoad: CSV
[1]
Jia L, He C, Xue C, et al. The device characteristics and fabrication method of 72-element CMUT array for long-range underwater imaging applications. Microsyst Technol, 2019, 25, 1195 doi: 10.1007/s00542-018-4062-4
[2]
Stojanovic M, and Preisig J. Underwater acoustic communication channels: Propagation models and statistical characterization. IEEE Commun Mag, 2009, 47, 84 doi: 10.1109/MCOM.2009.4752682
[3]
Herrera B, Pop F, Cassella C, et al. Miniaturized PMUT-based receiver for underwater acoustic networking. J Microelectromech S, 2020, 29, 832 doi: 10.1109/JMEMS.2020.3018070
[4]
Almeida R, Cruz N, and Matos A. Synchronized intelligent buoy network for underwater positioning. In Proceedings of the OMAE2010 29th International Conference on Ocean, 2010, 1 doi: 10.1109/OCEANS.2010.5663995
[5]
Francois D, Royer J, Perrot J. Long-term autonomous hydrophones for large-scale hydroacoustic monitoring of the oceans. In Proceedings of the 2012OCEANS, Yeosu, 2012, 1 doi: 10.1109/OCEANS-Yeosu.2012.6263519
[6]
Przybyla R, Flynn A, Jain V, et al. A micromechanical ultrasonic distance sensor with > 1 meter range. In Proceedings of the 16th International Conference on Solid-State Sensors, 2011, 2070 doi: 10.1109/TRANSDUCERS.2011.5969226
[7]
Benthowave Instrument Inc, Product Datasheet. [Online]. Available: https://www.benthowave.com/products/BII-7150Hydrophone.html
[8]
DolphinEar Hydrophones, Product Datasheet. [Online]. Available: http://www.dolphinear.com/de200.html
[9]
H2a Hydrophone User's Guide, Aquarian Audio, Anacortes, WA, USA
[10]
Brüel & Kjser. Hydrophones-Types 8103, 8104, 8105 and 8106. Sep, 2017
[11]
Liao W, Ren T, Yang Y, et al. Novel device design for an ultrasonic ranging system. Integr Ferroelectr, 2009, 105, 53 doi: 10.1080/10584580903039257
[12]
Jia L, Shi L, Liu C, et al. Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture. IEEE T Electron Dev, 2021, 68, 4656 doi: 10.1109/TED.2021.3093020
[13]
Jia L, Shi L, Lu Z, et al. A high-performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure. IEEE Electr Device L, 2021, 42, 1845 doi: 10.1109/LED.2021.3120806
[14]
Yaralioglu G, Ergun A, Bayram B, et al. Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers. IEEE T Ultrason Ferr, 2003, 50, 449 doi: 10.1109/TUFFC.2003.1197968
[15]
Khuri-Yakub B, Oralkan ?. Capacitive micromachined ultrasonic transducers for medical imaging and therapy. J Micromech Microeng, 2011, 21, 054004 doi: 10.1088/0960-1317/21/5/054004

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    History

    Received: 05 June 2024 Revised: 16 July 2024 Online: Accepted Manuscript: 03 September 2024Uncorrected proof: 04 September 2024Published: 15 November 2024

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      Licheng Jia, Rihui Xue, Fansheng Meng. Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. Journal of Semiconductors, 2024, 45(11): 112301. doi: 10.1088/1674-4926/24060007 ****L C Jia, R H Xue, and F S Meng, Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. J. Semicond., 2024, 45(11), 112301 doi: 10.1088/1674-4926/24060007
      Citation:
      Licheng Jia, Rihui Xue, Fansheng Meng. Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. Journal of Semiconductors, 2024, 45(11): 112301. doi: 10.1088/1674-4926/24060007 ****
      L C Jia, R H Xue, and F S Meng, Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. J. Semicond., 2024, 45(11), 112301 doi: 10.1088/1674-4926/24060007

      Design and characterization of a multi-ring nested CMUT array for hydrophone

      DOI: 10.1088/1674-4926/24060007

      • The Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China

      More Information
      • Licheng Jia received the Ph.D. degree in microelectronics and solid-state electronics in Wuhan University, Wuhan, China, in 2022. Presently, he is a lecturer at State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China. His research work is focusing on microfabrication, underwater MEMS and Bio-MEMS applications
      • Corresponding author: jialicheng@nuc.edu.cn
      • Received Date: 2024-06-05
      • Revised Date: 2024-07-16
        • Available Online: 2024-09-03

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